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SPA-LEED

Spot Profile Analyzing - LEED

SPA-LEED

(Picture from: Henzler,Göpel, Oberflächenphysik des Festkörpers, Teubner Stuttgart 1994)

quantitative spot analyzing with

high resolution (transfer width > 100 nm)
large dynamic range (approx. 10⁶)

structural information on

lateral roughness, terrace widths and island sizes
vertical roughness, step heights, layer distributions and asperity height

  (Pictures from: Wollschläger, Falta, Henzler, Appl.Phys. A 50, 57 (1990))

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